FEI DualBeam Strata 400S
|
Contact |
Tel. 0721 608-48294 (erich mueller ∂does-not-exist.kit edu) |
| Room | Bldg. 30.22, R. 206 |
|
Source |
Schottky FEG
|
| Ba-LMIS (FIB) | |
|
Energy |
Some 100 eV to 30 keV |
|
Detectors |
Everhart-Thornley-Detector (ETD) |
|
Through-the-Lens-Detector (TLD) |
|
|
STEM-III-Detector: bright-field (BF) a+b, dark-field (DF) a+b+c, high-angle annular dark-field (HAADF) in combination with a flip-stage |
|
|
EDXS-Detector: Bruker XFlash 5010 SDD detector (< 123 eV FWHM Mn Kα-line, Moxtek AP 3.3 window, 10mm2 detector area) |
|
|
Residual gas analyzer by Pfeiffer Vacuum |
|
|
Camera |
2 light cameras |
|
Sample holder |
Flip-stage holding 6 electron-transparent samples simultaneously |
|
Resolution |
1 nm at 30 keV (STEM)
|
|
7 nm (FIB) |
|
|
Imaging / Spectroscopic methods |
Detected electrons: secondary (SE), back-scattered (BSE), transmitted (STEM) |
| Energy dispersive X-ray spectroscopy (EDX)
|
|
|
Accessories |
Gas-injection-system (GIS) for Pt and W deposition |
|
OmniProbe manipulator “AutoProbe” |
|
|
Cold trap |
|
|
In-situ plasma cleaner by Evactron |
